JPH0431728Y2 - - Google Patents

Info

Publication number
JPH0431728Y2
JPH0431728Y2 JP1982132927U JP13292782U JPH0431728Y2 JP H0431728 Y2 JPH0431728 Y2 JP H0431728Y2 JP 1982132927 U JP1982132927 U JP 1982132927U JP 13292782 U JP13292782 U JP 13292782U JP H0431728 Y2 JPH0431728 Y2 JP H0431728Y2
Authority
JP
Japan
Prior art keywords
electron beam
sample
scanning
deflection
deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982132927U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5941854U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13292782U priority Critical patent/JPS5941854U/ja
Publication of JPS5941854U publication Critical patent/JPS5941854U/ja
Application granted granted Critical
Publication of JPH0431728Y2 publication Critical patent/JPH0431728Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
JP13292782U 1982-09-01 1982-09-01 走査透過電子顕微鏡 Granted JPS5941854U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13292782U JPS5941854U (ja) 1982-09-01 1982-09-01 走査透過電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13292782U JPS5941854U (ja) 1982-09-01 1982-09-01 走査透過電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5941854U JPS5941854U (ja) 1984-03-17
JPH0431728Y2 true JPH0431728Y2 (en]) 1992-07-30

Family

ID=30300024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13292782U Granted JPS5941854U (ja) 1982-09-01 1982-09-01 走査透過電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS5941854U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015029200A1 (ja) * 2013-08-30 2015-03-05 株式会社日立製作所 荷電粒子線レンズモジュール及びそれを備えた荷電粒子線装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605503Y2 (ja) * 1980-03-26 1985-02-20 日本電子株式会社 透過型走査電子顕微鏡

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015029200A1 (ja) * 2013-08-30 2015-03-05 株式会社日立製作所 荷電粒子線レンズモジュール及びそれを備えた荷電粒子線装置
JPWO2015029200A1 (ja) * 2013-08-30 2017-03-02 株式会社日立製作所 荷電粒子線レンズモジュール及びそれを備えた荷電粒子線装置

Also Published As

Publication number Publication date
JPS5941854U (ja) 1984-03-17

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